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1 article(s) from Kundrata, Ivan

Growth of lithium hydride thin films from solutions: Towards solution atomic layer deposition of lithiated films

Ivan Kundrata,
Karol Fröhlich,
Lubomír Vančo,
Matej Mičušík and
Julien Bachmann

Beilstein J. Nanotechnol. 2019, 10, 1443–1451, doi:10.3762/bjnano.10.142

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Figure 1: Illustration of the experimental deposition chamber. Top view, without cover. The chamber is closed...

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Figure 2: Chamber cover after deposition. The shape of the chamber is outlined by the PTFE paste used for sea...

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Figure 3: Samples in chamber during deposition, immediately before being taken out of the chamber. The glass ...

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Figure 4: GIXRD of as-deposited samples with indexed reflections attributed to cubic LiH. GIXRD was performed...

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Figure 5: Possible mechanism of the surface reactions.

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Figure 6: Derivative Auger spectra confirming the presence of Li₂O on the surface, acquired at two different ...

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Figure 7: XPS spectra before Ar sputtering of a) Li 1s region, b) C 1s and c) O 1s region.

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Figure 8: In situ QCM results, showing approximately 18 sALD cycles. The maxima and minima correspond to the ...

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Figure 9: SEM of the Si/Pt sample surface after deposition and exposure to atmosphere. The large crystal seen...

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Figure 10: SEM of a Si sample cleaved after deposition. The film thickness was estimated to be roughly 45 nm.

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Figure 11: Growth curve obtained from spectroscopic ellipsometry. The thickness is relative to the SEM cross-s...

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Full Research Paper

Published 18 Jul 2019

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